Multi-Function Semiconductor Fast Measurement System

This measurement system is suitable for electrical characterization of semiconductor electronic materials and nano-devices (I-V, C-V). It includes a temperature control system for temperature modulation and is equipped with a fast measurement module. It can perform fast AC measurements synchronized with arbitrary waveform scanning at a resolution of 10 ns, allowing for high-speed waveform analysis of transient electronic characteristics and the analysis of the reliability and electrical mechanisms of electronic devices. It supports measurements for up to 5-terminal devices. Measurements can be conducted at different temperatures using the Agilent B1500A semiconductor parameter analyzer and Agilent B1530A (WGFMU). The entire system is controlled using the Agilent Desktop EasyExpert measurement software, providing convenient and rapid measurement capabilities.

Service

1. Precision electrical measurements：Provide high-resolution I-V measurement, C-V measurement, C-F measurement, and reliability testing.

    Specifications：

HRSMU(High Resolution SMU) × 5

         Resolution：1fA/25μV to 100mA/100V

HPSMU(High Power SMU) × 1

Resolution：10fA/2μV to 1A/200V

PGU(Pulse Generator Unit) × 2

         Amplitude：40Vp-p

Pulse width：500μs to 2s (100μs res.)

Pulse period：5ms to 5s (100μs res.)

Transition time：8ns to 400ms (2ns to 8ns res.)

note：Source Monitor Unit(SMU)

MFCMU(Multi-Frequency capacitance measurement unit)

Frequency

Range：1kHz to 5MHz

Resolution：1mHz

Amplitude：100 V DC bias with SMU and SCUU (SMU CMU Unify Unit)

Output signal level：

Range：10mV to 250mV

Resolution：1mV

WGFMU(Waveform generator/fast measurement unit) × 2

Resolution：10ns

Amplitude：100 V DC bias with SMU and SCUU (SMU CMU Unify Unit)

2. Reliability analysis： DC stress   AC stress

3. Temperature-dependent measurements： 25℃ ~ 200℃

Charging standards

Instrument usage fee is 3,000-4,000 NTD per hour

Sample Preparation

Sample sizes must be within 12 inches.

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