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Nano Indenter System

MTS Nano-Indenter

Description of Features

The Nano IndenterXP features an exclusive CSM measurement system, allowing precise measurement of material properties such as hardness and elastic modulus.

It includes a high-resolution positioning platform and programmed path-setting function, enabling measurement of deposited thin film properties on substrates.

Instrument Description

  • Name: MTS Nano-Indenter
  • Original Manufacturer: Keysight Technologies
  • Dealer: Pentad Scientific Corporation
  • System Specifications:
  1. Indentation Displacement Resolution: 0.1 nm
  2. Total Indentation Travel Distance: 2 mm
  3. Indentation Depth Range: 25 nm to 500 mm
  4. Maximum Load: 30.5 N
  5. Force Resolution: < 500 nN
  6. Indentation Probe and Film Contact Force (contact force): 1 mN
  7. Load Frame Stiffness: 5 × 10^6 N/m
  • The loading mechanism is a linear system:
  1. Usable Platform Area:75 m m×100 mm
  2. Platform Moving Distance: X, Y 3100 mm
  3. Platform Positioning Accuracy: X, Y 1.5 mm
  4. Sample Specifications: 5×5 mm 2 ~ 10×10 mm2
  5. System Background Noise: Less than 50 dB

Service Items

  • Measurement of material hardness and Young's modulus
  • Currently, our center provides two different height specimen holders. Please prepare your specimens with pre-processing actions. The sampling diameter should be within the range of 5 × 5 mm² to 10 × 10 mm². Please adhere to the specified guidelines and do not exceed the prescribed range.

  • Our center offers fast adhesive for fixing the specimens. Blank optical discs are also available for storing experimental data. The cost of optical discs is not included and will be charged separately.

Notes

  1. The specimen surface must be clean with a surface roughness of less than 10 nm. If the surface is excessively rough, measurements cannot be conducted.
  2. The film thickness should be greater than 1000 Å (angstroms). The thicker the film, the more accurate the measured hardness and Young's modulus.
  3. Thin films should have good adhesion and not be easily peeled off; otherwise, it might soil (damage) the indentation probe.
  4. For submitting test samples, please directly contact the approved personnel in the processing department.

Charge

Items Fee Service Recipients
Training and Certification 2000 NTD/Batch Available for all departments and schools within NSYSU.
Only for departments specified in the NSYSU Nanotechnology Project collaboration agreement.

First Session: Machine Instruction.
Second Session: Trainee Practice.
Third Session: Examination.

If a trainee fails the examination, they need to pay again for recertification.

(One batch consists of three sessions, each lasting for 2 hours.)
Self-operation 400 NTD/hour Limited to certified/licensed individuals
Commisioned Operation 600 NTD/hour Available in all departments within NSYSU
Commisioned Operation 800 NTD/hour Available to all departments of Taiwan Comprehensive University System (NCHU, NCCU, NCKU); the pricing includes a 20% management fee.
Commisioned Operation 1000 NTD/hour Off-campus
Commisioned Operation 1500 NTD/hour Indutrial Company
Disc 10 NTD/piece No limit

For instrument operation time less than one hour, billing will be based on one hour.

Contact

Professor: Pan Zheng-Tang
Assistant: Lin Ming-Zheng
TEL: #4242 / 0980-001-809 Leo1127@mem.nsysu.edu .tw
Abbreviation: NanoIndenter
Location: International Research Building B1 (IR0001)
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