精密離子減薄系統(配有樣品冷凍台)

(Precision Ion Polishing System (PIPS) (added cold stage))

Ion source

• Ion Guns : Two penning ion guns with miniature rare earth magnets。
• Milling Angle : +10^o to -10^o, each gun independently adjustable。
• Ion Beam Energy : 1.5 keV to 6 keV 。
• Beam diameter : 350 µm ~800 µm FWHM at 5 keV for broad beam guns。
• Ion Current Density : 10mA/cm²。
• Beam alignment : Precision beam alignment using fluorescent screen。

Specimen Stage

• Sample Size : 3mm or 2.3mm。
• Mounting : Gatan patented DuoPost ^TM(Standard) or Graphite Holder(Optional) 。
• Rotation : Variable from 1 to 6 rpm。
• Beam Modulation : Single or double sector for exceptional cross-sectioning。
• Viewing : Binocular microscope 40X or 80X。

Vacuum

• Dry pumping system : Molecular drag pump backed by a 2-stage diaphragm pump。
• Pressure : 5E-6 torr base pressure, 8E-5 torr operating pressure。
• Vacuum gauge : Penning type for main chamber. Solid-state for backing pump。
• Specimen airlock : Gatan Whisperlok ^TM, specimen exchange time<30sec。

Dimensions and Utilities

• Overall size : 560mm W*480mm D*430mm H (22 ” W*19 ” D*17 ” H) 。
• Shipping weight : 45kg (100lbs) 。
• Power consumption : 200 Watts during operation, 100Watts with guns off。
• Power requirements : Universal 100VAC-240VAC, 50/60 Hz (User to specify voltage and frequency) 。

Gas

• Argon gas at 25 psi (1.72bar) 。
• No water cooling required。

The performance of the cold stage of the Ion Miller

• A sample post will reach a temperature of approximately -120℃~ the room temperature.
• The sample post will typically cool to nearly -100℃ in 10 minutes.
• It will reach its lowest temperature in 20~30 minutes.
• The sample will typically reach the same temperature as the post;
• how long this takes depends on the thermal conductivity of the sample and its thickness.

The cold stage controller

• The temperature measured at the cold conductor is typically about 50~75℃ cooler than the temperature at the sample.
• In addition, there is a time delay of about ten minutes between a change in cold conductor temperature and corresponding change in sample temperature.

收費標準 

儀器操作時間未滿一小時者，以一小時計費

聯絡方式 :  

負責教授：  張六文 教授        工學院 材料與光電科學系       TEL：07-5252000轉4060

聯絡人：  顏采蓉       材料與光電科學系        TEL：07-5252000轉4085

儀器地點：國立中山大學國際研究大樓地下1樓(IR0001)